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Fabrication of Macro Scale 3D Structures Using MEMS Technology
The addition of Deep Reactive Ion Etching (DRIE) in the fabrication of micro-electro-mechanical-systems(MEMS) has enabled the creation of many new structures that were not previously feasible. By combining this technique ...
Detection and Mitigation of Electrostatic Pull-in Instability in MEMS Parallel Plate Actuators
Electrostatic MEMS actuators are used in a wide variety of applications including micro- machined gyroscopes, high speed mechanical switches, variable capacitors, and vibration isolation devices. MEMS parallel plate ...