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Browsing by Author "Adanur, Emir"

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A Novel Through-Silicon-Via (TSV) Fabrication Method 

Adanur, Emir (2011-07-18)
The Through Silicon Via (TSV) is expected to be the future of 3-D chip stacking technology for electronic devices. The structure of the TSV interconnect is developed by first etching deep vias into the surface of a wafer, ...