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Micromachined Isolators for Shock and Vibration Reliability of MEMS Sensors: Fabrication, Damping, and Integration
Bottenfield, Brent (2020-11-20)
This dissertation details the design, FEA simulation, fabrication, and testing of three variations of micromachined vibration isolators (MVIs). The vibration isolators serve as low pass filters to attenuate high frequency ...