Browsing by Author "Liu, Dan"

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Investigation Into The Effect Of Substrate On Pb(Zr0.52Ti0.48)O3 Films

Liu, Dan (2011-04-28)

During the past several decades, PZT (Pb(Zr,Ti)O3) thin films were given extensive attention for their potential as sensors and actuators in microelectromechanical systems (MEMS) due to their excellent piezoelectric ...