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Fabrication of 3-D Nanoscale Structures of Arbitrary Shape by a Single-step E-beam Grayscale Lithographic Process
Liu, Dong (2010-04-09)
Three dimensional (3-D) structures are widely utilized and critical to device functionality in many applications, such as PBG (photonic band gap) crystals, DOE's (diffractive optical elements), blazed gratings, MEMS, NEMS ...