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Preliminary Study of Tribology: Uniform Control of the Density Control of the Functionalized Gold Nanoparticles on a Modified Silicon Surface
(2008-09-09)
Microelectromechanical Systems (MEMS) are important in diverse fields such as BioMEMS, optical MEMS, and radio frequency MEMS. The low cost, small device size and high reliability are contributing to successful commercialization ...