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Preliminary Study of Tribology: Uniform Control of the Density Control of the Functionalized Gold Nanoparticles on a Modified Silicon Surface




Kang, Chan

Type of Degree



Chemical Engineering


Microelectromechanical Systems (MEMS) are important in diverse fields such as BioMEMS, optical MEMS, and radio frequency MEMS. The low cost, small device size and high reliability are contributing to successful commercialization in MEMS markets. However, the miniature device components can generate surface forces that form undesirable tribological issues between microstructures. The important interfacial forces are capillary, molecular Van der Waals forces and electrostatic force. The uniform distribution of gold nanoparticles can be used to study tribological issues in MEMS devices. Simple methods to control the density control of colloidal gold nanoparticles on silicon surfaces were investigated. Preliminary work showed that and silicon surfaces modified with 3-MPTMS solution interact with gold nanoparticles. Atomic force microscopy (AFM) images support the notion that Si surface modification is the most important work in this study with ligand modified gold nanoparticles. The examination of the density control on a silicon surface can be manipulated through control of the concentration of colloidal gold nanoparticles, deposition time, concentration of 3-MPTMS solution, and temperature. A relatively high density of gold nanoparticles forms on the silicon surface if the concentration of gold nanoparticles and 3-MPTMS is increased. In addition, with a 3 hour deposition time we find a maximum number of gold nanoparticles while thermal effects are minimal. However, there are some restrictions on experimental conditions because it is not possible to control gold nanoparticles density on a dirty surface. Mathematical equations used with the particle analysis tool in AFM take advantage of the expected the particle density.