Nonlinear Control and Design Methodologies for Electrostatic MEMS Devices
Metadata Field | Value | Language |
---|---|---|
dc.contributor.advisor | Hung, John | |
dc.contributor.advisor | Ramadoss, Ramesh | en_US |
dc.contributor.advisor | Dean, Robert N. | en_US |
dc.contributor.author | Ozmun, Phillip M. | en_US |
dc.date.accessioned | 2008-09-09T21:24:41Z | |
dc.date.available | 2008-09-09T21:24:41Z | |
dc.date.issued | 2007-08-15 | en_US |
dc.identifier.uri | http://hdl.handle.net/10415/887 | |
dc.description.abstract | A method to extend the travel range of electrostatically actuated MEMS device is presented. A gap closing actuator (GCA) is used to demonstrate the method. An output (position)feedback controller is presented, along with two variable structure controllers. The forced-damping variable structure controller uses two stable structures, and the sliding mode (hybrid) controller uses an unstable and a stable structure. An adaptive controller is also presented for devices that have adequate natural damping. A design methodology for nonlinear mechanical springs is presented. The mechanical nonlinearity offsets the electrostatic nonlinearity to extend the device travel range without feedback. | en_US |
dc.language.iso | en_US | en_US |
dc.subject | Electrical and Computer Engineering | en_US |
dc.title | Nonlinear Control and Design Methodologies for Electrostatic MEMS Devices | en_US |
dc.type | Thesis | en_US |
dc.embargo.length | NO_RESTRICTION | en_US |
dc.embargo.status | NOT_EMBARGOED | en_US |