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Browsing Auburn Theses and Dissertations by Author "Ji, Hyesung"
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Designing an Anisotropic Noise Filter for Measuring Critical Dimension and Line Edge Roughness from SEM Images
Ji, Hyesung (2018-04-23)
The scanning electron microscope (SEM) is often employed in inspecting patterns transferred through a lithographic process. A typical inspection is to measure the critical dimension (CD) and line edge roughness (LER) of ...