Browsing Auburn Theses and Dissertations by Author "Olsen, Darren"

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Detection and Mitigation of Electrostatic Pull-in Instability in MEMS Parallel Plate Actuators

Stevens, Colin (2013-07-19)

Electrostatic MEMS actuators are used in a wide variety of applications including micro- machined gyroscopes, high speed mechanical switches, variable capacitors, and vibration isolation devices. MEMS parallel plate ...