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Nonlinear Control and Design Methodologies for Electrostatic MEMS Devices

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OZMUN__16.pdf (712.4Kb)
Date
2007-08-15
Author
Ozmun, Phillip M.
Type of Degree
Thesis
Department
Electrical and Computer Engineering
Metadata
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Abstract
A method to extend the travel range of electrostatically actuated MEMS device is presented. A gap closing actuator (GCA) is used to demonstrate the method. An output (position)feedback controller is presented, along with two variable structure controllers. The forced-damping variable structure controller uses two stable structures, and the sliding mode (hybrid) controller uses an unstable and a stable structure. An adaptive controller is also presented for devices that have adequate natural damping. A design methodology for nonlinear mechanical springs is presented. The mechanical nonlinearity offsets the electrostatic nonlinearity to extend the device travel range without feedback.
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61.91Kb
Name:
OZMUN__16.pdf  
Size:
712.4Kb
URI
http://hdl.handle.net/10415/887

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