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dc.contributor.advisorHung, John
dc.contributor.advisorRamadoss, Rameshen_US
dc.contributor.advisorDean, Robert N.en_US
dc.contributor.authorOzmun, Phillip M.en_US
dc.date.accessioned2008-09-09T21:24:41Z
dc.date.available2008-09-09T21:24:41Z
dc.date.issued2007-08-15en_US
dc.identifier.urihttp://hdl.handle.net/10415/887
dc.description.abstractA method to extend the travel range of electrostatically actuated MEMS device is presented. A gap closing actuator (GCA) is used to demonstrate the method. An output (position)feedback controller is presented, along with two variable structure controllers. The forced-damping variable structure controller uses two stable structures, and the sliding mode (hybrid) controller uses an unstable and a stable structure. An adaptive controller is also presented for devices that have adequate natural damping. A design methodology for nonlinear mechanical springs is presented. The mechanical nonlinearity offsets the electrostatic nonlinearity to extend the device travel range without feedback.en_US
dc.language.isoen_USen_US
dc.subjectElectrical and Computer Engineeringen_US
dc.titleNonlinear Control and Design Methodologies for Electrostatic MEMS Devicesen_US
dc.typeThesisen_US
dc.embargo.lengthNO_RESTRICTIONen_US
dc.embargo.statusNOT_EMBARGOEDen_US


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